Patent Assignment
Reel/Frame 020281/0306
Assignment of Assignor's Interest
Recorded: 2007-12-20
Pages: 3
Assignor
SUDA, HIROMI
Executed: 2007-11-12
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Exposure Apparatus and Device Fabrication Method