Patent Assignment
Reel/Frame 020281/0705
Assignment of Assignor's Interest
Recorded: 2007-12-17
Pages: 3
Assignors
KANDA, HIROYUKI
Executed: 2007-10-15
SUSAKI, AKIRA
Executed: 2007-10-15
YAMAMOTO, SATORU
Executed: 2007-10-15
NAKADA, TSUTOMU
Executed: 2007-10-15
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method