Patent Assignment
Reel/Frame 020287/0572
Assignment of Assignor's Interest
Recorded: 2007-12-26
Pages: 2
Assignor
MANN, HANS-JUERGEN
Executed: 2007-12-05
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Six-Mirror Euv Projection System with Low Incidence Angles
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.