Patent Assignment
Reel/Frame 020298/0183
Assignment of Assignor's Interest
Recorded: 2007-12-26
Pages: 2
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Attaching/Detaching Method of Reaction Vessel
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.