Patent Assignment
Reel/Frame 020298/0207
Assignment of Assignor's Interest
Recorded: 2007-12-28
Pages: 4
Assignors
OIKAWA, MASAYUKI
Executed: 2006-03-02
ANBAI, KATSUHIKO
Executed: 2006-03-02
TAKAHASHI, NOBUHIRO
Executed: 2006-03-06
HAYASHI, TERUYUKI
Executed: 2006-03-06
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Examination Method and Examination Assistant Device for Quartz Product of Semiconductor Processing Apparatus