Patent Assignment
Reel/Frame 020311/0273
Assignment of Assignor's Interest
Recorded: 2008-01-03
Pages: 3
Assignor
GEH, BERND
Executed: 2007-03-19
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Objective for Microlithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.