Patent Assignment
Reel/Frame 020349/0895
Assignment of Assignor's Interest
Recorded: 2008-01-10
Pages: 4
Assignors
TANAKA, KOICHIRO
Executed: 2007-12-26
MORIWAKA, TOMOAKI
Executed: 2007-12-26
OMATA, TAKATSUGU
Executed: 2007-12-26
MOMO, JUNPEI
Executed: 2007-12-26
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398 HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method of Crystallizing Semiconductor Film and Method of Manufacturing Semiconductor Device