Patent Assignment
Reel/Frame 020359/0171
Assignment of Assignor's Interest
Recorded: 2008-01-11
Pages: 2
Assignors
UEDA, TATSUSHI
Executed: 2007-11-04
TERASAKI, TADASHI
Executed: 2007-10-23
OGAWA, UNRYU
Executed: 2007-10-24
HIRANO, AKITO
Executed: 2007-10-12
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.