Patent Assignment
Reel/Frame 020359/0308
Assignment of Assignor's Interest
Recorded: 2008-01-14
Pages: 4
Assignors
ZHANG, LIN
Executed: 2003-05-08
CHEN, XIAOLIN
Executed: 2003-05-08
LI, DONGQING
Executed: 2003-05-08
PHAM, THANH N.
Executed: 2003-05-13
MOGHADAM, FARHAD K.
Executed: 2003-05-15
LI, ZHUANG
Executed: 2003-05-13
KRISHNARAJ, PADMANABHAN
Executed: 2003-05-08
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Deposition-Selective Etch-Deposition Process for Dielectric Film Gapfill