Patent Assignment
Reel/Frame 020360/0344
Assignment of Assignor's Interest
Recorded: 2008-01-14
Pages: 2
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU,, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate processing apparatus for semiconductor devices
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.