Patent Assignment
Reel/Frame 020401/0354
Assignment of Assignor's Interest
Recorded: 2008-01-23
Pages: 4
Assignors
HERGENHAN, GUIDO
Executed: 2007-11-30
ZIENER, CHRISTIAN
Executed: 2007-11-30
MOERITZ, MIKE
Executed: 2007-11-30
Assignee
XTREME TECHNOLOGIES GMBH
GOESCHWITZER STRASSE 25, JENA, D-07745, GERMANY
Covered Property
(1)
Arrangement and Method for the Generation of Extreme Ultraviolet Radiation by Means of an Electrically Operated Gas Discharge
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Change of Assignee's Address
Sep 7, 2010
From: XTREME TECHNOLOGIES GMBH
To: XTREME TECHNOLOGIES GMBH
Reel/Frame 024949/0955 →
Change of Assignee's Address
Oct 25, 2011
From: XTREME TECHNOLOGIES GMBH
To: XTREME TECHNOLOGIES GMBH
Reel/Frame 027114/0810 →
Assignment of Assignor's Interest
Jan 17, 2014
From: XTREME TECHNOLOGIES GMBH
To: USHIO DENKI KABUSHIKI KAISHA
Reel/Frame 032086/0615 →