Patent Assignment
Reel/Frame 020411/0109
Assignment of Assignor's Interest
Recorded: 2008-01-22
Pages: 4
Assignors
SALNIK, ALEX
Executed: 2007-12-11
OPSAL, JON
Executed: 2007-12-05
NICOLAIDES, LENA
Executed: 2008-01-09
Assignee
KLA-TENCOR CORPORATION
160 RIO ROBLES, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Methods for Depth Profiling in Semiconductors Using Modulated Optical Reflectance Technology