Patent Assignment
Reel/Frame 020418/0101
Assignment of Assignor's Interest
Recorded: 2008-01-25
Received: 2008-01-25
Pages: 2
Assignor
SUGINO, KANJI
Executed: 2008-01-17
Assignee
ELPIDA MEMORY, INC.
2-1, YAESU 2-CHOME, CHUO-KU, TOKYO, JPX, 104-0028, JAPAN
Covered Property
(1)
Semiconductor Device Having a Focus Monitor Mark, Focus Monitoring Method, and Device Production Method with Dot Pattern Mark and Hole Pattern Mark to Optimize Focus Position and Exposure Dose
Application:
12/019,728 →