IP Library Patent Application 12019728
Patent Application Utility
App. No. 12/019,728 · Confirmation No. 1571

SEMICONDUCTOR DEVICE HAVING A FOCUS MONITOR MARK, FOCUS MONITORING METHOD, AND DEVICE PRODUCTION METHOD WITH DOT PATTERN MARK AND HOLE PATTERN MARK TO OPTIMIZE FOCUS POSITION AND EXPOSURE DOSE

Inventor: Kanji SUGINO
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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Code Description Pages PDF
2014-10-03 ABN Abandonment 2 View
2014-02-05 CTFR Final Rejection 8 View
2014-02-05 SRNT Examiner's search strategy and results 1 View
2014-02-05 SRFW Search information including classification, databases and other search related notes 2 View
2013-12-18 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2013-12-18 CLM Claims 3 View
2013-12-18 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2013-12-18 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-12-18 WFEE Fee Worksheet (SB06) 1 View
2013-09-19 CTNF Non-Final Rejection 9 View
2013-09-19 SRNT Examiner's search strategy and results 2 View
2013-09-19 SRFW Search information including classification, databases and other search related notes 2 View
2013-08-09 RCEX Request for Continued Examination (RCE) 3 View
2013-08-09 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2013-08-09 CLM Claims 3 View
2013-08-09 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2013-08-09 WFEE Fee Worksheet (SB06) 2 View
2013-08-09 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-08-09 WFEE Fee Worksheet (SB06) 1 View
2013-04-10 CTFR Final Rejection 11 View
2013-04-10 SRFW Search information including classification, databases and other search related notes 1 View
2013-04-10 SRNT Examiner's search strategy and results 1 View
2013-02-19 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2013-02-19 CLM Claims 5 View
2013-02-19 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2013-02-19 DRW Drawings-only black and white line drawings 4 View
2013-02-19 WFEE Fee Worksheet (SB06) 2 View
2013-02-19 N417 Electronic Filing System Acknowledgment Receipt 3 View
2013-02-19 WFEE Fee Worksheet (SB06) 1 View
2012-10-16 CTNF Non-Final Rejection 7 View
2012-10-16 SRNT Examiner's search strategy and results 1 View
2012-10-16 SRFW Search information including classification, databases and other search related notes 1 View
2012-10-02 AP.PRE.DEC Pre-Brief Appeal Conference decision 2 View
2012-08-22 AP.PRE.REQ Pre-Appeal Brief Conference Request 5 View
2012-08-22 WFEE Fee Worksheet (SB06) 2 View
2012-08-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-08-22 N/AP Notice of Appeal Filed 1 View
2012-03-27 CTFR Final Rejection 7 View
2012-03-27 SRFW Search information including classification, databases and other search related notes 1 View
2012-03-27 SRNT Examiner's search strategy and results 2 View
2012-03-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2012-03-07 CLM Claims 4 View
2012-03-07 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2012-03-07 WFEE Fee Worksheet (SB06) 2 View
2012-03-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-03-07 WFEE Fee Worksheet (SB06) 1 View
2011-11-10 CTNF Non-Final Rejection 11 View
2011-11-10 SRNT Examiner's search strategy and results 5 View
2011-11-10 SRFW Search information including classification, databases and other search related notes 1 View
2011-06-24 RCEX Request for Continued Examination (RCE) 3 View
2011-06-24 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2011-06-24 CLM Claims 7 View
2011-06-24 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2011-06-24 WFEE Fee Worksheet (SB06) 2 View
2011-06-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-06-24 WFEE Fee Worksheet (SB06) 1 View
2011-03-03 CTFR Final Rejection 9 View
2011-03-03 SRNT Examiner's search strategy and results 1 View
2011-03-03 SRFW Search information including classification, databases and other search related notes 1 View
2011-01-19 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2011-01-19 SPEC Specification 1 View
2011-01-19 CLM Claims 6 View
2011-01-19 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2011-01-19 WFEE Fee Worksheet (SB06) 2 View
2011-01-19 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-01-19 WFEE Fee Worksheet (SB06) 1 View
2010-10-14 CTNF Non-Final Rejection 6 View
2010-10-14 892 List of references cited by examiner 1 View
2010-10-14 1449 List of References cited by applicant and considered by examiner 1 View
2010-10-14 1449 List of References cited by applicant and considered by examiner 2 View
2010-10-14 FOR Foreign Reference 19 View
2010-10-14 SRFW Search information including classification, databases and other search related notes 1 View
2010-10-14 SRNT Examiner's search strategy and results 2 View
2009-09-23 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2009-02-12 TRAN.LET Transmittal Letter 2 View
2009-02-12 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2009-02-12 FOR Foreign Reference 19 View
2009-02-12 FOR Foreign Reference 16 View
2009-02-12 FOR Foreign Reference 12 View
2009-02-12 FOR Foreign Reference 12 View
2009-02-12 N417 Electronic Filing System Acknowledgment Receipt 3 View
2008-07-31 NTC.PUB Notice of Publication 1 View
2008-06-27 PD.FILED.E Priority Documents electronically retrieved by USPTO from a participating IP Office 24 View
2008-02-15 APP.FILE.REC Filing Receipt 3 View
2008-01-25 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2008-01-25 TRAN.LET Transmittal Letter 2 View
2008-01-25 WFEE Fee Worksheet (SB06) 2 View
2008-01-25 N417 Electronic Filing System Acknowledgment Receipt 3 View
2008-01-25 ADS Application Data Sheet 4 View
2008-01-25 SPEC Specification 18 View
2008-01-25 CLM Claims 6 View
2008-01-25 ABST Abstract 1 View
2008-01-25 DRW Drawings-only black and white line drawings 11 View
2008-01-25 OATH Oath or Declaration filed 2 View
2008-01-25 FOR Foreign Reference 8 View
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Quick Facts
App. No.
12/019,728
Filed
2008-01-25
Pub. No.
US20080180647A1
Art Unit
2882