Patent Application
Utility
App. No. 12/019,728
· Confirmation No. 1571
SEMICONDUCTOR DEVICE HAVING A FOCUS MONITOR MARK, FOCUS MONITORING METHOD, AND DEVICE PRODUCTION METHOD WITH DOT PATTERN MARK AND HOLE PATTERN MARK TO OPTIMIZE FOCUS POSITION AND EXPOSURE DOSE
Inventor:
Kanji SUGINO
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2014-10-03 | ABN |
Abandonment | 2 | View | |
| 2014-02-05 | CTFR |
Final Rejection | 8 | View | |
| 2014-02-05 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2014-02-05 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2013-12-18 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2013-12-18 | CLM |
Claims | 3 | View | |
| 2013-12-18 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2013-12-18 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2013-12-18 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2013-09-19 | CTNF |
Non-Final Rejection | 9 | View | |
| 2013-09-19 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2013-09-19 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2013-08-09 | RCEX |
Request for Continued Examination (RCE) | 3 | View | |
| 2013-08-09 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2013-08-09 | CLM |
Claims | 3 | View | |
| 2013-08-09 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2013-08-09 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-08-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2013-08-09 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2013-04-10 | CTFR |
Final Rejection | 11 | View | |
| 2013-04-10 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2013-04-10 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2013-02-19 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2013-02-19 | CLM |
Claims | 5 | View | |
| 2013-02-19 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2013-02-19 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2013-02-19 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-02-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2013-02-19 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2012-10-16 | CTNF |
Non-Final Rejection | 7 | View | |
| 2012-10-16 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2012-10-16 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2012-10-02 | AP.PRE.DEC |
Pre-Brief Appeal Conference decision | 2 | View | |
| 2012-08-22 | AP.PRE.REQ |
Pre-Appeal Brief Conference Request | 5 | View | |
| 2012-08-22 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2012-08-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-08-22 | N/AP |
Notice of Appeal Filed | 1 | View | |
| 2012-03-27 | CTFR |
Final Rejection | 7 | View | |
| 2012-03-27 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2012-03-27 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2012-03-07 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2012-03-07 | CLM |
Claims | 4 | View | |
| 2012-03-07 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2012-03-07 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2012-03-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-03-07 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2011-11-10 | CTNF |
Non-Final Rejection | 11 | View | |
| 2011-11-10 | SRNT |
Examiner's search strategy and results | 5 | View | |
| 2011-11-10 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2011-06-24 | RCEX |
Request for Continued Examination (RCE) | 3 | View | |
| 2011-06-24 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2011-06-24 | CLM |
Claims | 7 | View | |
| 2011-06-24 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2011-06-24 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2011-06-24 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2011-06-24 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2011-03-03 | CTFR |
Final Rejection | 9 | View | |
| 2011-03-03 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2011-03-03 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2011-01-19 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2011-01-19 | SPEC |
Specification | 1 | View | |
| 2011-01-19 | CLM |
Claims | 6 | View | |
| 2011-01-19 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2011-01-19 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2011-01-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2011-01-19 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2010-10-14 | CTNF |
Non-Final Rejection | 6 | View | |
| 2010-10-14 | 892 |
List of references cited by examiner | 1 | View | |
| 2010-10-14 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2010-10-14 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2010-10-14 | FOR |
Foreign Reference | 19 | View | |
| 2010-10-14 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2010-10-14 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2009-09-23 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2009-02-12 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2009-02-12 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2009-02-12 | FOR |
Foreign Reference | 19 | View | |
| 2009-02-12 | FOR |
Foreign Reference | 16 | View | |
| 2009-02-12 | FOR |
Foreign Reference | 12 | View | |
| 2009-02-12 | FOR |
Foreign Reference | 12 | View | |
| 2009-02-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2008-07-31 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2008-06-27 | PD.FILED.E |
Priority Documents electronically retrieved by USPTO from a participating IP Office | 24 | View | |
| 2008-02-15 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2008-01-25 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2008-01-25 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2008-01-25 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2008-01-25 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2008-01-25 | ADS |
Application Data Sheet | 4 | View | |
| 2008-01-25 | SPEC |
Specification | 18 | View | |
| 2008-01-25 | CLM |
Claims | 6 | View | |
| 2008-01-25 | ABST |
Abstract | 1 | View | |
| 2008-01-25 | DRW |
Drawings-only black and white line drawings | 11 | View | |
| 2008-01-25 | OATH |
Oath or Declaration filed | 2 | View | |
| 2008-01-25 | FOR |
Foreign Reference | 8 | View |
Inventors
Kanji SUGINO
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
355/55
G03F7/70641
G03F7/70558
Prosecution
- Examiner
- LIU, CHIA HOW MICHAEL
- Art Unit
- 2882
- Customer No.
- 466
- Docket No.
- 5754-1003
- Confirmation No.
- 1571
Foreign Priority
2007-015015
·
2007-01-25
·
JAPAN
Publication
- Pub. No.
- US20080180647A1
- Pub. Date
- 2008-07-31
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Quick Facts
- App. No.
- 12/019,728
- Filed
- 2008-01-25
- Pub. No.
- US20080180647A1
- Examiner
- LIU, CHIA HOW MICHAEL
- Art Unit
- 2882
External Links