Patent Assignment
Reel/Frame 020420/0087
Assignment of Assignor's Interest
Recorded: 2008-01-28
Pages: 3
Assignor
YAMAZOE, KENJI
Executed: 2007-12-26
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Measurement Method, Exposure Method, Exposure Apparatus, and Device Fabrication Method