Patent Assignment
Reel/Frame 020430/0868
Assignment of Assignor's Interest
Recorded: 2008-01-22
Received: 2008-01-29
Pages: 2
Assignor
KOMEDA, KENJI
Executed: 2008-01-18
Assignee
ELPIDA MEMORY, INC.
2-1, YAESU 2-CHOME, CHUO-KU, TOKYO, JPX, JAPAN
Covered Property
(1)
Atomic layer deposition system including a plurality of exhaust tubes
Application:
12/010,149 →