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App. No. 12/010,149 · Confirmation No. 3900

Atomic layer deposition system including a plurality of exhaust tubes

Inventor: Kenji Komeda
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2015-05-22 ABN Abandonment 2 View
2014-11-06 CTNF Non-Final Rejection 9 View
2014-11-06 892 List of references cited by examiner 1 View
2014-11-06 FWCLM Index of Claims 1 View
2014-11-06 SRNT Examiner's search strategy and results 3 View
2014-11-06 SRFW Search information including classification, databases and other search related notes 1 View
2012-12-28 WFEE Fee Worksheet (SB06) 1 View
2012-12-19 RCEX Request for Continued Examination (RCE) 3 View
2012-12-19 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2012-12-19 CLM Claims 9 View
2012-12-19 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2012-12-19 WFEE Fee Worksheet (SB06) 2 View
2012-12-19 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-06-19 CTFR Final Rejection 8 View
2012-06-19 892 List of references cited by examiner 1 View
2012-06-19 SRFW Search information including classification, databases and other search related notes 1 View
2012-06-19 FWCLM Index of Claims 1 View
2012-06-19 SRNT Examiner's search strategy and results 1 View
2012-03-01 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2012-03-01 SPEC Specification 1 View
2012-03-01 CLM Claims 8 View
2012-03-01 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2012-03-01 WFEE Fee Worksheet (SB06) 2 View
2012-03-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-03-01 WFEE Fee Worksheet (SB06) 1 View
2011-09-02 CTNF Non-Final Rejection 8 View
2011-09-02 892 List of references cited by examiner 1 View
2011-09-02 FOR Foreign Reference 41 View
2011-09-02 1449 List of References cited by applicant and considered by examiner 1 View
2011-09-02 1449 List of References cited by applicant and considered by examiner 2 View
2011-09-02 SRFW Search information including classification, databases and other search related notes 1 View
2011-09-02 FWCLM Index of Claims 1 View
2011-09-02 SRNT Examiner's search strategy and results 3 View
2011-06-08 ELC. Response to Election / Restriction Filed 1 View
2011-06-08 CLM Claims 9 View
2011-06-08 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2011-06-08 WFEE Fee Worksheet (SB06) 2 View
2011-06-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-06-08 WFEE Fee Worksheet (SB06) 1 View
2011-02-11 CTRS Requirement for Restriction/Election 5 View
2009-09-23 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2009-02-12 TRAN.LET Transmittal Letter 2 View
2009-02-12 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2009-02-12 FOR Foreign Reference 10 View
2009-02-12 FOR Foreign Reference 7 View
2009-02-12 FOR Foreign Reference 7 View
2009-02-12 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-07-24 NTC.PUB Notice of Publication 1 View
2008-06-24 PD.FILED.E Priority Documents electronically retrieved by USPTO from a participating IP Office 26 View
2008-02-28 APP.FILE.REC Filing Receipt 3 View
2008-02-28 NTC.PUB.DATE Notice of New or Revised Publication Date 1 View
2008-01-22 TRAN.LET Transmittal Letter 2 View
2008-01-22 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2008-01-22 FOR Foreign Reference 4 View
2008-01-22 WFEE Fee Worksheet (SB06) 1 View
2008-01-22 WFEE Fee Worksheet (SB06) 1 View
2008-01-22 TRNA Transmittal of New Application 2 View
2008-01-22 SPEC Specification 21 View
2008-01-22 CLM Claims 5 View
2008-01-22 ABST Abstract 1 View
2008-01-22 DRW Drawings-only black and white line drawings 14 View
2008-01-22 OATH Oath or Declaration filed 2 View
2008-01-22 ADS Application Data Sheet 3 View
2008-01-22 136A Authorization for Extension of Time all replies 2 View
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Quick Facts
App. No.
12/010,149
Filed
2008-01-22
Pub. No.
US20080176412A1
Art Unit
1714