Patent Assignment
Reel/Frame 020465/0644
Assignment of Assignor's Interest
Recorded: 2008-02-05
Pages: 3
Assignor
YAMAZAWA, YOHEI
Executed: 2007-12-20
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Plasma Processing Apparatus with Filter Circuit