Patent Assignment
Reel/Frame 020466/0948
Assignment of Assignor's Interest
Recorded: 2008-02-05
Pages: 6
Assignors
KO, FRANCIS
Executed: 2008-01-29
LAI, CHIH-WEI
Executed: 2008-01-29
ZUO, KEWEI
Executed: 2008-01-30
LO, HENRY
Executed: 2008-01-29
WANG, JEAN
Executed: 2008-01-30
CHEN, PING-HSU
Executed: 2008-01-31
LIN, CHUN-HSIEN
Executed: 2008-01-29
YU, CHEN-HUA
Executed: 2008-01-29
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Automatic Virtual Metrology for Semiconductor Wafer Result Prediction