Patent Assignment
Reel/Frame 020475/0118
Assignment of Assignor's Interest
Recorded: 2008-02-04
Pages: 3
Assignee
LASERTEC CORPORATION
4-10-4 TSUNASHIMA-HIGASHI, KOHOKU-KU, YOKOHAMA-SHI, KANAGAWA 223-8551, JAPAN
Covered Property
(1)
Focus Control Method for an Optical Apparatus Which Inspects a Photo-Mask or the Like