Patent Assignment
Reel/Frame 020477/0502
Assignment of Assignor's Interest
Recorded: 2008-01-18
Pages: 4
Assignors
KUGLER, JENS
Executed: 2007-06-25
SORG, FRANZ
Executed: 2007-06-14
KWAN, YIM-BUN PATRICK
Executed: 2007-06-01
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Module for a Microlithography Objective Including Holding and Supporting Devices
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.