Patent Assignment
Reel/Frame 020479/0341
Assignment of Assignor's Interest
Recorded: 2008-02-07
Pages: 2
Assignor
ABURATANI, YUKINORI
Executed: 2008-01-31
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU,, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Manufacturing Method for Semiconductor Devices
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.