Patent Assignment
Reel/Frame 020480/0814
Assignment of Assignor's Interest
Recorded: 2008-02-07
Pages: 6
Assignors
SHANNON, STEVEN C
Executed: 2007-12-03
CHAFIN, MICHAEL G
Executed: 2007-11-15
GRIMARD, DENNIS S
Executed: 2007-11-20
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Time-Based Wafer De-Chucking from an Electrostatic Chuck Having Separate Rf Bias and Dc Chucking Electrodes