Patent Assignment
Reel/Frame 020485/0760
Assignment of Assignor's Interest
Recorded: 2008-02-08
Pages: 4
Assignors
HARADA, YUJI
Executed: 2007-10-09
HATAKEYAMA, JUN
Executed: 2007-10-09
YOSHIHARA, TAKAO
Executed: 2007-10-09
KUSAKI, WATARU
Executed: 2007-10-09
KOBAYASHI, TOMOHIRO
Executed: 2007-10-09
HASEGAWA, KOJI
Executed: 2007-10-09
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Polymer, Resist Composition, and Patterning Process