Patent Assignment
Reel/Frame 020493/0469
Assignment of Assignor's Interest
Recorded: 2008-02-11
Pages: 2
Assignors
HORII, SADAYOSHI
Executed: 2008-01-24
ITATANI, HIDEHARU
Executed: 2008-01-24
HARADA, KAZUHIRO
Executed: 2008-01-24
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTO-KANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Manufacturing Method of Semiconductor Device, and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.