Patent Assignment
Reel/Frame 020511/0497
Assignment of Assignor's Interest
Recorded: 2008-02-14
Pages: 6
Assignors
CHAN, LANA HIULUI
Executed: 2008-01-31
ASHTIANI, KAIHAN
Executed: 2008-01-30
COLLINS, JOSHUA
Executed: 2008-02-08
Assignee
NOVELLUS SYSTEMS, INC.
3970 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Methods for Growing Low-Resistivity Tungsten for High Aspect Ratio and Small Features