Patent Assignment
Reel/Frame 020516/0366
Assignment of Assignor's Interest
Recorded: 2008-02-15
Pages: 3
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Microlithography Illumination Systems, Components and Methods
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.