Patent Assignment
Reel/Frame 020527/0975
Assignment of Assignor's Interest
Recorded: 2008-02-19
Pages: 3
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Pellicle for Use in a Microlithographic Exposure Apparatus
Application:
11/994,747 →
Publication:
US 2009/0059189
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.