Patent Assignment
Reel/Frame 020553/0557
Assignment of Assignor's Interest
Recorded: 2008-02-25
Pages: 2
Assignee
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
1006 OAZA KADOMA, KADOMA-SHI, OSAKA, 571-8501, JAPAN
Covered Property
(1)
Plasma processing apparatus, method for detecting abnormality of plasma processing apparatus and plasma processing method
Application:
11/898,144 →
Publication:
US 2008/0067146
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.