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App. No. 11/898,144 · Confirmation No. 1077

Plasma processing apparatus, method for detecting abnormality of plasma processing apparatus and plasma processing method

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2011-10-25 ABN Abandonment 2 View
2011-08-10 WFEE Fee Worksheet (SB06) 1 View
2011-07-01 CTAV Advisory Action (PTOL-303) 3 View
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2011-06-14 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2011-06-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-03-16 CTFR Final Rejection 14 View
2011-03-16 892 List of references cited by examiner 1 View
2011-03-16 SRFW Search information including classification, databases and other search related notes 1 View
2011-03-16 SRNT Examiner's search strategy and results 2 View
2011-03-16 BIB Bibliographic Data Sheet 1 View
2011-03-07 TRAN.LET Transmittal Letter 2 View
2011-03-07 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2011-03-07 FOR Foreign Reference 8 View
2011-03-07 FOR Foreign Reference 9 View
2011-03-07 FOR Foreign Reference 26 View
2011-03-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-01-04 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2011-01-04 CLM Claims 8 View
2011-01-04 REM Applicant Arguments/Remarks Made in an Amendment 7 View
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2011-01-04 XT/ Extension of Time 1 View
2011-01-04 WFEE Fee Worksheet (SB06) 1 View
2010-09-29 CTNF Non-Final Rejection 11 View
2010-09-29 892 List of references cited by examiner 1 View
2010-09-29 SRFW Search information including classification, databases and other search related notes 1 View
2010-09-29 SRNT Examiner's search strategy and results 2 View
2010-09-29 1449 List of References cited by applicant and considered by examiner 3 View
2010-09-29 FOR Foreign Reference 48 View
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2010-08-26 ELC. Response to Election / Restriction Filed 1 View
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2008-03-20 NTC.PUB Notice of Publication 1 View
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2007-09-10 TRNA Transmittal of New Application 2 View
2007-09-10 SPEC Specification 33 View
2007-09-10 CLM Claims 8 View
2007-09-10 ABST Abstract 1 View
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2007-09-10 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
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2007-09-10 FRPR Certified Copy of Foreign Priority Application 31 View
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Quick Facts
App. No.
11/898,144
Filed
2007-09-10
Pub. No.
US20080067146A1
Art Unit
1713