Patent Assignment
Reel/Frame 020561/0434
Assignment of Assignor's Interest
Recorded: 2008-02-14
Pages: 2
Assignor
UEDA, KAZUHIRO
Executed: 2008-01-22
Assignee
HITACHI, LTD.
6-6. MARUNOUCHI 1-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Inspection Method for Thin Film Stack