Patent Assignment
Reel/Frame 020562/0359
Assignment of Assignor's Interest
Recorded: 2008-02-13
Pages: 2
Assignors
MORI, MASAHITO
Executed: 2008-01-30
KOFUJI, NAOYUKI
Executed: 2008-01-30
ITABASHI, NAOSHI
Executed: 2008-01-30
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
1-24-14, NISHI SHIMBASHI, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.