Patent Assignment
Reel/Frame 020572/0733
Assignment of Assignor's Interest
Recorded: 2008-02-27
Pages: 3
Assignors
OZAKI, TAKASHI
Executed: 2008-01-24
KASAHARA, OSAMU
Executed: 2008-01-28
NODA, TAKAAKI
Executed: 2008-01-31
MAEDA, KIYOHIKO
Executed: 2008-01-28
MORIYA, ATSUSHI
Executed: 2008-01-31
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Semiconductor Device Manufacturing Method and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.