Patent Assignment
Reel/Frame 020577/0749
Assignment of Assignor's Interest
Recorded: 2008-02-28
Pages: 5
Assignors
BIRKNER, ANDREAS
Executed: 2008-02-25
HOFMANN, MICHAEL
Executed: 2008-02-25
VOLLRATH, WOLFGANG, DR.
Executed: 2008-02-25
Assignee
VISTEC SEMICONDUCTOR SYSTEMS GMBH
KUBACHER WEG 4, WEILBURG, 35781, GERMANY
Covered Property
(1)
Device and Method for Evaluating Defects in the Edge Area of a Wafer and Use of the Device in Inspection System for Wafers