Patent Assignment
Reel/Frame 020578/0405
Assignment of Assignor's Interest
Recorded: 2008-02-28
Pages: 8
Assignors
KOELMEL, BLAKE
Executed: 2008-01-29
LERNER, ALEXANDER N.
Executed: 2008-02-05
RANISH, JOSEPH M.
Executed: 2008-01-31
SANGAM, KEDARNATH
Executed: 2008-01-30
SORABJI, KHURSHED
Executed: 2008-01-30
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Apparatus and Method for Supporting, Positioning and Rotating a Substrate in a Processing Chamber