Patent Assignment
Reel/Frame 020578/0714
Assignment of Assignor's Interest
Recorded: 2008-02-20
Pages: 12
Assignors
SCHAFFER, DIRK
Executed: 2008-01-22
HEINTEL, WILLI
Executed: 2008-01-23
FEDERAU, HAGEN
Executed: 2008-01-17
HARTJES, JOACHIM
Executed: 2008-01-17
KIRCHNER, HARALD
Executed: 2008-01-22
Assignee
CARL ZEISS SMT AG.
RUDOLF-EBER-STR. 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Optical element unit and method of supporting an optical element
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.