Patent Assignment
Reel/Frame 020579/0129
Assignment of Assignor's Interest
Recorded: 2008-02-28
Pages: 2
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and Apparatus for Interferometrically Measuring the Shape of a Test Object
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.