Patent Assignment
Reel/Frame 020592/0781
Assignment of Assignor's Interest
Recorded: 2008-03-03
Pages: 2
Assignors
HAYASHIDA, AKIRA
Executed: 2008-02-26
UENO, MASAAKI
Executed: 2008-02-22
SHIMADA, MASAKAZU
Executed: 2008-02-26
ABURATANI, YUKINORI
Executed: 2008-02-25
YAMADA, TOMOYUKI
Executed: 2008-02-22
NAKASHIMA, SEIYO
Executed: 2008-02-25
SUGISHITA, MASASHI
Executed: 2008-02-22
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus Having Gas Side Flow via Gas Inlet
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.