Assignment of Assignor's Interest

Recorded: 2008-03-04 Pages: 4

Assignors

MUELLER, RALF

Executed: 2008-02-22

GOEHNERMEIER, AKSEL

Executed: 2008-02-26

SINGER, WOLFGANG

Executed: 2008-02-27

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Catadioptric Projection Objective with Tilted Deflecting Mirrors, Projection Exposure Apparatus, Projection Exposure Method, and Mirror

Patent: 8,027,088 →

Application: 11/964,527 →

Publication: US 2008/0158665

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.