Patent Assignment
Reel/Frame 020612/0748
Assignment of Assignor's Interest
Recorded: 2008-03-06
Pages: 5
Assignors
LIU, JUNJUN
Executed: 2008-02-21
TOMA, DOREL I.
Executed: 2008-02-26
LEE, ERIC M.
Executed: 2008-02-27
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Removing a Pore-Generating Material from an Uncured Low-K Dielectric Film