Assignment of Assignor's Interest

Recorded: 2008-03-07 Pages: 5

Assignors

SINGER, WOLFGANG

Executed: 2008-01-28

HAINZ, JOACHIM

Executed: 2008-01-23

SCHUBERT, ERICH

Executed: 2008-01-21

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Double-Facetted Illumination System with Attenuator Elements on the Pupil Facet Mirror

Application: 11/961,431 →

Publication: US 2008/0165925

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.