Patent Assignment
Reel/Frame 020629/0255
Assignment of Assignor's Interest
Recorded: 2008-03-05
Pages: 6
Assignors
DUSA, MIRCEA
Executed: 2007-09-07
NACKAERTS, AXEL
Executed: 2008-02-20
VERHAEGEN, GUSTAAF
Executed: 2008-02-20
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Semiconductor Device for Measuring an Overlay Error, Method for Measuring an Overlay Error, Lithographic Apparatus and Device Manufacturing Method