Assignment of Assignor's Interest

Recorded: 2008-03-12 Pages: 5

Assignors

KAISER, WINFRIED

Executed: 2008-03-06

ULRICH, WILHELM

Executed: 2008-02-27

FELDMANN, HEIKO

Executed: 2008-03-04

DODOC, AURELIAN

Executed: 2008-03-06

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Projection Exposure System With Different Exposure Configurations Having Different Image Side Numerical Apertures and Different Image Field Sizes

Application: 11/951,746 →

Publication: US 2008/0151211

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.