Patent Assignment
Reel/Frame 020655/0436
Assignment of Assignor's Interest
Recorded: 2008-03-14
Pages: 2
Assignors
WEISER, MARTIN
Executed: 2008-01-23
BURKART, STEFAN
Executed: 2008-01-23
MALTOR, HOLGER
Executed: 2008-01-23
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Irradiation with High Energy Ions for Surface Structuring and Treatment of Surface Proximal Sections of Optical Elements
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.