Patent Assignment
Reel/Frame 020661/0066
Assignment of Assignor's Interest
Recorded: 2008-03-17
Pages: 3
Assignor
SCHUSTER, KARL-HEINZ
Executed: 2006-08-17
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Imaging System, in Particular a Projection Objective of a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.