Patent Assignment
Reel/Frame 020684/0756
Assignment of Assignor's Interest
Recorded: 2008-03-21
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Raw Material Feeding Device, Film Formation System and Method for Feeding Gaseous Raw Material