Patent Assignment
Reel/Frame 020687/0335
Assignment of Assignor's Interest
Recorded: 2008-03-19
Pages: 4
Assignors
SUGISHITA, MASASHI
Executed: 2008-02-06
UENO, MASAAKI
Executed: 2008-02-06
HAYASHIDA, AKIRA
Executed: 2008-02-06
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 1018980, JAPAN
Covered Property
(1)
Substrate Processing Method and Semiconductor Manufacturing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.