Patent Assignment
Reel/Frame 020691/0986
Assignment of Assignor's Interest
Recorded: 2008-03-24
Pages: 3
Assignors
SHIMIZU, MASAHIRO
Executed: 2007-12-20
KASAI, SHIGERU
Executed: 2007-12-20
YONEDA, MASATAKE
Executed: 2007-12-20
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Heat Treatment Apparatus, Computer Program, and Storage Medium