Patent Assignment
Reel/Frame 020692/0182
Assignment of Assignor's Interest
Recorded: 2008-03-24
Pages: 3
Assignor
SASAKI, MASARU
Executed: 2007-11-30
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Selective Plasma Processing Method