Patent Assignment
Reel/Frame 020693/0001
Assignment of Assignor's Interest
Recorded: 2008-03-24
Pages: 3
Assignor
HONDA, MASANOBU
Executed: 2008-03-10
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus